Real-time monitoring of fabrication of integrated computational elements

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United States of America Patent

PATENT NO 10914863
APP PUB NO 20160223712A1
SERIAL NO

14397719

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Abstract

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Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design using a deposition source, where the layers of the ICEs being formed are supported on a support that is periodically moved relative to the deposition source during the forming; monitoring characteristics of the layers of the ICEs during the forming, the monitoring of the characteristics being performed using a timing of the periodic motion of the support relative to the deposition source; and adjusting the forming based on results of the monitoring.

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Patent Owner(s)

  • HALLIBURTON ENERGY SERVICES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nayak, Aditya B Humble, US 20 58
Perkins, David L The Woodlands, US 157 1603
Price, James M The Woodlands, US 70 355

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