Test pattern layout for test photomask and method for evaluating critical dimension changes

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United States of America Patent

PATENT NO 9996000
SERIAL NO

15094226

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Aspects of the present invention relate to a test photomask and a method for evaluating critical dimension changes in the test photomask. Various embodiments include a test photomask. The test photomask includes a plurality of cells having a varied density pattern. The plurality of cells include a first group of cells arranged along a first line, the first group of cells having a first combined density ratio. The plurality of cells also include a second group of cells arranged along a second line, the second group of cells having a second combined density ratio. In the plurality of cells, the second combined density ratio for the second group of cells is equal to the first combined density ratio of the first group of cells. The varied density pattern is configured to substantially neutralize fogging effects.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION; TOPPAN PRINTING CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caldwell, Brian N Meridian, US 5 1
Fujita, Yuki Tokyo, JP 47 221
Jeffer, Raymond W South Burlington, US 3 0
Levin, James P South Burlington, US 10 66
Malenfant,, Jr Joseph L Colchester, US 3 0
Nash, Steven C Essex Junction, US 7 28

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