Imprint apparatus, imprint method, and article manufacturing method
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United States of America Patent
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Mar 26, 2019
Grant Date -
Aug 4, 2016
app pub date -
Oct 16, 2014
filing date -
Nov 5, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An imprint apparatus includes: a stage configured to hold the substrate; a detector configured to detect a relative position between a shot region and the mold in a direction parallel to a surface of the substrate; and a controller configured to obtain, in an imprint process on a shot region different from a target shot region, information relating to a relative position, between the other shot region and the mold, used for aligning the other shot region after bringing the mold and the imprint material into contact with each other, and, when performing the imprint process on the target shot region, adjust a relative position between the target shot region and the mold in the direction by using a detection result on the target shot region and the obtained information.
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