ACOUSTIC WAVE ELEMENTS, AND DUPLEXERS AND ELECTRONIC DEVICES USING SAME
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United States of America Patent
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Apr 8, 2016
filing date -
Oct 9, 2013
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Abstract
An acoustic wave element that includes a piezoelectric body, an aluminum oxide layer disposed on the piezoelectric body, an electrode disposed on the aluminum oxide layer, and a protection film disposed on the aluminum oxide layer to cover the electrode. The piezoelectric body is formed of a piezoelectric material based on lithium niobate having Euler angles (φ, θ, ψ). The aluminum oxide layer is formed of Al2O3. The electrode is configured to excite a main acoustic wave having a wavelength λ. The protection film has a film thickness greater than 0.27λ. The Euler angles satisfy either ψ≦−2φ−3° or −2φ+3°≦ψ and both of −100°≦θ≦−60° and 2φ−2°≦ψ≦2φ+2°.
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