Method for manufacturing glass film laminate, glass film laminate, and method for manufacturing electronic device
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United States of America Patent
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Apr 2, 2019
Grant Date -
Aug 11, 2016
app pub date -
Oct 7, 2014
filing date -
Oct 16, 2013
priority date (Note) -
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Abstract
Provided are a glass film layered body and a method for manufacturing a glass film layered body whereby glass film yield and nondefective product rate are enhanced while handling properties of the glass film are enhanced. A method for manufacturing a glass film layered body fabricated by layering a glass film on a support glass, the method provided with an ultrasonic wave application step for applying ultrasonic waves to at least peripheral parts of the glass film and the support glass, a cleaning step for cleaning the glass film and support glass which have undergone the ultrasonic wave application step, and a layering step for layering the glass film on the support glass which has undergone the cleaning step and fabricating a glass film layered body.
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