Apparatus for scanning nano structure with plural AFM probes and method thereof

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United States of America Patent

PATENT NO 9581617
APP PUB NO 20160231351A1
SERIAL NO

14981705

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Abstract

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Plural AFM probes with different resolutions are implemented on an apparatus for scanning a nearly free-standing nanometer-scale specimen. The apparatus identifies the location and the shape of the nano structure on a specimen piece using a high resolution AFM probe, and then measures a three-dimensional shape of the identified nano structure using an atomic resolution AFM probe.

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Patent Owner(s)

  • KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Jhinhwan Daejeon, KR 4 5
Son, Donghyeon Daejeon, KR 2 4

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