Apparatus and method for processing a substrate

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United States of America Patent

PATENT NO 9852948
SERIAL NO

15015061

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Abstract

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A method of processing a substrate is disclosed. The method includes the following steps: providing a substrate body having a surface; placing a die on the surface, wherein the die acts as a catalyst; immersing the substrate body and the die in a reaction solution; and processing the substrate body via a chemical reaction occurring on the surface through the reaction solution and the catalyst.

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Patent Owner(s)

  • NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Tse-Ming Taipei, TW 3 6
Chu, Yuan-Han Taipei, TW 2 1
Hwang, Bing-Joe Taipei, TW 52 91
Jeng, Jeng-Ywan Taipei, TW 36 121
Su, Wei-Nien Taipei, TW 26 31
Teng, Hsin-Fu Taipei, TW 2 1

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