Drain select gate formation methods and apparatus

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United States of America Patent

PATENT NO 9842847
SERIAL NO

14619243

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Abstract

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Some embodiments include a string of charge storage devices formed along a vertical channel of semiconductor material; a gate region of a drain select gate (SGD) transistor, the gate region at least partially surrounding the vertical channel; a dielectric barrier formed in the gate region; a first isolation layer formed above the gate region and the dielectric barrier; a drain region of the SGD transistor formed above the vertical channel; and a second isolation layer formed above the first isolation layer and the drain region, wherein the second isolation layer includes a conductive contact in electrical contact with the drain region of the SGD transistor. Additional apparatus and methods are disclosed.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gou, Lijing Boise, US 24 103
Haller, Gordon Boise, US 47 698
Tran, Luan C Meridian, US 176 3480
Zhu, Hongbin Boise, US 110 867

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