Flow meter and flow control device provided therewith
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United States of America Patent
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Sep 11, 2018
Grant Date -
Aug 18, 2016
app pub date -
Oct 21, 2014
filing date -
Oct 28, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A flow meter includes an inlet side switching valve, an outlet side switching valve on a downstream of the inlet side valve, and a control valve on a downstream of the outlet side valve that are connected with each other by flow passages having internal volumes, a pressure sensor on an upstream side of the control valve, and a larger flow rate measuring section for calculating a flow rate based on a build-down volume of an internal volume of the passage between an outlet of the inlet side valve and an inlet of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume of an inner capacity of the passage between an outlet of the outlet side valve and the inlet of the control valve.
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