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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD	8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chang, Chia-Hao	Hsin-Chu, TW	341	1009
Chen, Cheng-Long	Hsin-Chu, TW	14	92
Lien, Wai-Yi	Hsin-Chu, TW	78	1261
Liu, Chi-Wen	Hsin-Chu, TW	280	6296
Shieh, Ming-Shan	Hsin-Chu, TW	9	79
Wang, Chih-Hao	Baoshan Township, TW	1024	6928
Wang, Chin-Chi	New Taipei City, TW	15	109

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Feb 18, 2024
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 18, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0240,623

VERTICAL GATE ALL AROUND (VGAA) DEVICES AND METHODS OF MANUFACTURING THE SAME

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