Load measuring apparatus and load measuring method

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United States of America Patent

PATENT NO 9719869
APP PUB NO 20160243592A1
SERIAL NO

15045643

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Abstract

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A load measuring apparatus includes a waterproof load cell having a load measuring surface, of which the length is substantially equal to a diameter of the substrate, and a base plate that supports the waterproof load cell. The load measuring apparatus is set in a substrate cleaning apparatus like a substrate, and measures a load applied from the roll cleaning tool of the substrate cleaning apparatus using the waterproof load cell.

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Patent Owner(s)

  • EBARA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Hideaki Tokyo, JP 468 5300

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