Fabrication of Tetherable Patterned Thin Film with 3D Rolled-up Structure

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United States of America Patent

APP PUB NO 20160246176A1
SERIAL NO

14753028

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Abstract

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The present invention provides a fabrication of a tetherable patterned thin film with 3D tube-shaped structure. The fabrication includes following steps: preparing a substrate; covering a supportive layer onto the substrate; defining a pattern portion onto the supportive layer; depositing a thin film layer onto the pattern portion; opening at least one concavity onto the supportive layer; removing the substrate in a temperature range; and forming a tube-shaped thin film.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL TSING HUA UNIVERSITYHSINCHU CITY 30013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ger, Tzong-Rong Hsin Chu City, TW 8 0
Huang, Chen-Yu Hsin Chu City, TW 17 83
Wei, Zung-Hang Hsin Chu City, TW 8 16

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