Sample processing evaluation apparatus

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United States of America Patent

PATENT NO 9679743
SERIAL NO

15048073

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Abstract

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A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.

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Patent Owner(s)

  • HITACHI HIGH-TECH SCIENCE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Toshiaki Tokyo, JP 81 854
Suzuki, Hiroyuki Tokyo, JP 829 9965

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