Non-contact method to monitor and quantify effective work function of metals

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United States of America Patent

PATENT NO 10763179
APP PUB NO 20160252565A1
SERIAL NO

15055062

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Abstract

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An example semiconductor wafer includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, and a layer of the metal disposed on the dielectric layer. An example method of determining an effective work function of a metal on the semiconductor wafer includes determining a surface barrier voltage of the semiconductor wafer, and determining a metal effective work function of the semiconductor wafer based, at least in part, on the surface barrier voltage.

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Patent OwnerAddress
ONTO INNOVATION SDI LLC12415 TELECOM DR TAMPA FL 33637

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ferng, Shyh-Shin Hsin-Chu, TW 6 102
Lagowski, Jacek Tampa, US 25 780
Lin, Sheng-Shin Hsin-Chu, TW 2 8
Lin, Yi-Hung Hsin-Chu, TW 156 1648
Loy, Thye Chong Chubei, TW 1 2
Marinskiy, Dmitriy Tampa, US 9 63
Wang, Sung-Li Hsin-Chu, TW 152 6994
Wu, Lin-Jung Hsin-Chu, TW 9 976

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