Pressure-type flow controller

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United States of America Patent

PATENT NO 10386863
APP PUB NO 20160252913A1
SERIAL NO

15027828

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Abstract

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A pressure-type flow controller includes a main body provided with a fluid channel between a fluid inlet and a fluid outlet and an exhaust channel between the fluid channel and an exhaust outlet; a pressure control valve fixed to the fluid inlet of the main body for opening/closing the upstream side of the fluid channel; a pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the pressure control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; and an exhaust control valve for opening/closing the exhaust channel.

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Patent Owner(s)

  • FUIIKIN INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dohi, Ryousuke Osaka, JP 103 1938
Hirata, Kaoru Osaka, JP 69 820
Ikeda, Nobukazu Osaka, JP 232 4012
Nishino, Kouji Osaka, JP 165 2271
Sugita, Katsuyuki Osaka, JP 54 342

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