METHOD FOR COATING SURFACES

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United States of America Patent

APP PUB NO 20160254125A1
SERIAL NO

14634129

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Abstract

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A method for providing a protective layer over a substrate is provided. A ceramic layer is deposited over the substrate, wherein the ceramic layer has a porosity. A localized heating of a region of the ceramic layer to a temperature that causes the ceramic layer to melt without damaging the substrate is provided, wherein the melting the ceramic layer reduces the porosity or seals fissures or columnar grain boundaries. The region of the ceramic layer heated by the localized heating is scanned over the ceramic layer.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HUANG, Lihua Li Pleasanton, US 13 1096
PATTON, Evan E Pleasanton, US 33 2042
POPIOLKOWSKI, Alan Los Banos, US 4 299
RICHARDSON, Brett C San Ramon, US 25 673
SHIH, Hong Santa Clara, US 104 3498

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