Evacuation of a film chamber

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United States of America Patent

PATENT NO 10844877
APP PUB NO 20160258448A1
SERIAL NO

15023087

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Abstract

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A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

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Patent Owner(s)

  • INFICON GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bruhns, Hjalmar Bonn, DE 9 32
Dauenhauer, Michael Cologne, DE 4 11
Decker, Silvio Cologne, DE 26 77
Wetzig, Daniel Cologne, DE 50 218

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