OPTICAL METHOD FOR MONITORING PLASMA DISCHARGING GLOW
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United States of America Patent
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Sep 8, 2016
app pub date -
Sep 9, 2015
filing date -
Mar 4, 2015
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Abstract
An optical method for monitoring plasma discharging glow is described, which includes the following steps. Plasma discharging glow is detected to obtain various optical signals using a detector. The optical signals are captured and converted into various electric signals by using a sensing circuit. A calculation step is performed according to the electric signals to obtain various light intensities corresponding to various locations in the plasma discharging glow using an arithmetic unit. An image of the plasma discharging glow is reconstructed according to the locations in the plasma discharging glow and the corresponding light intensities using an image reconstruction unit.
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