Semiconductor storage device
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United States of America Patent
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Oct 11, 2016
Grant Date -
Sep 15, 2016
app pub date -
Jul 23, 2015
filing date -
Mar 9, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A semiconductor storage device according to an embodiment comprises stacks comprising insulating films and first wires that are alternately stacked. Semiconductor parts are provided in the stacks. The longitudinal direction of the semiconductor parts is a stacking direction of the insulating films and the first wires. Charge accumulation layers are provided between the first wires and the semiconductor parts and a plurality of the charge accumulation layers are provided corresponding to one of the semiconductor parts in a cross-section in a direction perpendicular to the longitudinal direction of the semiconductor parts. A width of first side surfaces of the semiconductor parts on which the charge accumulation layers are provided is larger at bottom ends of the semiconductor parts than at top ends of the semiconductor parts.
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