MEMS DEVICE
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United States of America Patent
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N/A
Issued Date -
Sep 22, 2016
app pub date -
Mar 10, 2016
filing date -
Mar 16, 2015
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first electrode fixed on the substrate. The first electrode includes a first one end portion and a first other end portion. A capacitor insulating film is provided on the first electrode. An insulating film is provided on the substrate and located around a periphery of the first electrode. A second electrode is provided above the first electrode and movable. The second electrode includes a second one end portion corresponding to the first one end portion, and a second other end portion corresponding to the first other end portion. The second one end portion extends outside the first one end portion and includes a first bent portion bent downward.
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