ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Sep 22, 2016
app pub date -
Sep 2, 2015
filing date -
Sep 2, 2015
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Abstract
According to one embodiment, an electronic device includes a MEMS element provided on an underlying region, and a protection film including a first layer, a second layer provided on the first layer, and a third layer provided on the second layer, the protection film covering the MEMS element and forming a cavity in an inside thereof. An outer periphery of the second layer is located inside an outer periphery of the cavity, as viewed in a direction perpendicular to a surface of the underlying region.
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