APPARATUS AND METHOD FOR PRODUCING ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE POWDER PREPARED THEREBY
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United States of America Patent
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Sep 22, 2016
app pub date -
Mar 18, 2016
filing date -
Mar 18, 2016
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Abstract
Disclosed herein are an apparatus and a method for producing aluminum nitride powder, and aluminum nitride powder prepared thereby. The apparatus for producing aluminum nitride powder includes: a vertical reactor including an aluminum source supplier for supplying aluminum source and a nitrogen source supplier for supplying nitrogen source, the vertical reactor causing chemical vapor reaction between the aluminum source and the nitrogen source supplied therein; a trap device including a membrane for passing resulting products from the reaction; and a bubbling device for capturing the products having passed through the trap device.
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