MEASUREMENT APPARATUS
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United States of America Patent
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Issued Date -
Sep 22, 2016
app pub date -
Mar 15, 2016
filing date -
Mar 18, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a measurement apparatus for measuring a shape of an object to be measured, including an image capturing unit configured to obtain an image by capturing the object to be measured on which pattern light alternately including bright portions and dark portions is projected, and a processing unit configured to specify at least one of a peak position at which a luminance value is local maximum in a luminance distribution obtained from the image and a peak position at which the luminance value is local minimum in the luminance distribution, and at least one of a local maximum position and a local minimum position in a luminance gradient obtained from the luminance distribution, and obtain, based on the specified positions, information of the shape of the object to be measured.
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Cited Art Landscape
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