Phase plate, method of fabricating same, and electron microscope
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United States of America Patent
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Oct 10, 2017
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N/A
app pub date -
Mar 11, 2016
filing date -
Mar 12, 2015
priority date (Note) -
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Abstract
A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.
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