System and method for scanning an object

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9490101
APP PUB NO 20160276127A1
SERIAL NO

14658993

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Abstract

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A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.

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Patent Owner(s)

  • APPLIED MATERIALS ISRAEL, LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Greenberg, Ofir Haniel, IL 3 6
Gronau, Yuval Ramat Hasharon, IL 34 195
Schleyen, Ran Gdera, IL 8 17
Schwarzband, Ishai Or-Yehuda, IL 25 127
Sender, Benzion Modiin-Macabim-Reut, IL 13 226
Shemesh, Dror Hod Hasharon, IL 35 258

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