SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD THEREFOR

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United States of America Patent

APP PUB NO 20160276397A1
SERIAL NO

14844164

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Abstract

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A solid-state imaging device according to an embodiment includes a first semiconductor layer of a first conductivity type, a photodiode region in which a second semiconductor layer of a second conductivity type is formed in a surface of the first semiconductor layer, a first interlayer insulating film which is formed on the first semiconductor layer and on the photodiode region, a first fixed charge film which is formed on the first interlayer insulating film and has a charge of the second conductivity type, a second interlayer insulating film which is formed on or above the first fixed charge film, and a second fixed charge film which is formed on the second interlayer insulating film and has a charge of the second conductivity type.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ARAKAWA, Kenichi Fujisawa, JP 30 247

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