Angular velocity detection element, angular velocity detection device, electronic apparatus, and moving object
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United States of America Patent
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Oct 2, 2018
Grant Date -
Sep 29, 2016
app pub date -
Mar 16, 2016
filing date -
Mar 23, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A gyro element includes a base section, vibrating arms connected to the base section, driving piezoelectric elements disposed on the vibrating arms and causing a flexural vibration in the drive vibration mode of X-axis in-phase and Z-axis inverse-phase, and detecting piezoelectric elements disposed on the vibrating arms and adapted to detect the angular velocity around the detection axis, and in a case of making the vibrating arms flexurally vibrate in the drive vibration mode, signals having respective phases reverse to each other are generated in the detecting piezoelectric elements, and in a case in which the angular velocity is applied while making the vibrating arms flexurally vibrate in the drive vibration mode, signals having respective phases the same as each other are generated in the detecting piezoelectric elements.
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