Method for inspecting physical quantity sensor and method for manufacturing physical quantity sensor

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United States of America Patent

PATENT NO 10041796
APP PUB NO 20160290828A1
SERIAL NO

15075656

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Abstract

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A method for inspecting a physical quantity sensor includes: applying a test drive signal while changing a voltage level, to an angular velocity sensor as a physical quantity sensor having a detection portion which performs detection vibration according to a physical quantity; detecting an output signal from the detection portion corresponding to the test drive signal, as a test detection signal; and performing pass/fail determination based on a change in the test detection signal in relation to the change in the voltage level.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oshio, Masahiro Shiojiri, JP 29 133
Sato, Kenji Matsumoto, JP 531 4758

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