Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
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United States of America Patent
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Jul 18, 2017
Grant Date -
Oct 6, 2016
app pub date -
Mar 1, 2016
filing date -
Apr 1, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
In an electro-optical device, a torsion hinge and a mirror support post are formed as one piece together with a conductive member, and in the mirror support post, a first end portion on a substrate side is an open end which is opened toward the substrate. In the mirror support post, a second end portion on a mirror side is a flat plate which closes an opening of the mirror support post, and the mirror is in contact with a surface of the flat plate at a side opposite to the substrate. The first sacrificial layer which is used for manufacturing the electro-optical device is formed by exposure, development, and etching in a state in which a hard mask is formed, with respect to the photosensitive resin layer.
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