Electro-optical device and electronic apparatus
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United States of America Patent
Stats
-
Jul 25, 2017
Grant Date -
Oct 6, 2016
app pub date -
Mar 2, 2016
filing date -
Apr 1, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
There is provided an electro-optical device comprising a substrate, a first torsion hinge disposed above the substrate in a thickness direction, the first torsion hinge having a first hinge support portion configured to support the first torsion hinge in the thickness direction, a second torsion hinge disposed above the first torsion hinge in the thickness direction, the second torsion hinge having a second hinge support portion configured to support the second torsion hinge in the thickness direction, and a mirror disposed above the second torsion hinge in the thickness direction, the mirror having a mirror support portion configured to support the mirror in the thickness direction. The second hinge support portion does not overlap the first hinge support portion in a planar view of the substrate, and the mirror support portion does not overlap the second hinge support portion in the planar view of the substrate.
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