IMPRINTING APPARATUS, METHOD OF CREATING DATA ON MATERIAL DISTRIBUTION, IMPRINTING METHOD, AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 6, 2016
app pub date -
Mar 28, 2016
filing date -
Mar 28, 2016
priority date (Note) -
Published
status (Latency Note)
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Abstract
Provided is an imprinting apparatus that forms patterns sequentially on a plurality of areas of a substrate by using a mold and imprint material. The apparatus includes a moving unit configured to be movable along a horizontal plane while carrying the substrate on which the imprint material is provided, and an applying unit configured to apply the imprint material onto the substrate based on information related to a state of the imprint material and information related to an order of pattern formation, the information related to the state of the imprint material varying with the movement of the moving unit.
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