Method and Device for Applying a Coating to a Substrate

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United States of America Patent

APP PUB NO 20160296968A1
SERIAL NO

15093828

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A device for applying a coating to a substrate comprises a metering device by means of which a coating fluid can be applied to the substrate as a jet, and a solvent dispenser which is arranged eccentrically and to the side of the front end of the metering device in such a way that a predetermined amount of solvent can be administered to the front end of the metering device. This device can implement a method for applying a coating to a substrate wherein, before the coating fluid is applied, a predetermined amount of solvent is brought to the front end of the metering device in such a way that the solvent comes into contact with the coating fluid located there. After a waiting period, the coating fluid is subsequently applied to the substrate by means of the metering device.

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Patent Owner(s)

Patent OwnerAddress
SUSS MICROTEC LITHOGRAPHY GMBH90 SCHLEISSHEIMER STR GARCHING 85748

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fakhr, Omar Brunnthal, DE 3 1

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