SEMICONDUCTOR DEVICE TESTING APPARATUS, SEMICONDUCTOR DEVICE TESTING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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United States of America Patent
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app pub date -
Jun 28, 2016
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Aug 21, 2014
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Abandoned
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Abstract
A semiconductor device testing apparatus according to an embodiment includes: a first terminal and a second terminal that apply voltage to a semiconductor device; and a light source that irradiates the semiconductor device with ultraviolet light.
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