Method of manipulating a sample in an evacuated chamber of a charged particle apparatus

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United States of America Patent

PATENT NO 11017980
APP PUB NO 20160307727A1
SERIAL NO

15099453

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.

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Patent Owner(s)

  • FEI COMPANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baken, Petronella Catharina Maria Eindhoven, NL 1 0
Poloucek, Pavel Brno, CZ 3 6
Vesseur, Ernst Jan Ruben Utrecht, NL 1 0
Vystav{hacek, over (e)}l Tomá{hacek over (s)} Brno, CZ 11 8

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