Semiconductor manufacturing device with embedded fluid conduits
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United States of America Patent
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Nov 26, 2019
Grant Date -
Oct 27, 2016
app pub date -
Apr 21, 2015
filing date -
Apr 21, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Provided herein are approaches for forming a conduit embedded within a component of a semiconductor manufacturing device (e.g., an ion implanter) using an additive manufacturing process (e.g., 3-D printing), wherein the conduit is configured to deliver a fluid throughout the component to provide heating, cooling, and gas distribution thereof. In one approach, the conduit includes a set of raised surface features formed on an inner surface of the conduit for varying fluid flow characteristics within the conduit. In another approach, the conduit may be formed in a helical configuration. In another approach, the conduit is formed with a polygonal cross section. In another approach, the component of the ion implanter includes at least one of an ion source, a plasma flood gun, a cooling plate, a platen, and/or an arc chamber base.
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