Importance

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Abstract

A wafer boat for receiving wafers, in particular semiconductor wafers, includes at least two elongated receiving elements made of quartz, each receiving element having a plurality of parallel receiving slots, which extend transverse to the longitudinal extension of the receiving elements, and two end plates, between which the receiving elements are arranged and attached such that the receiving slots of the receiving elements are aligned. For increasing the stability, the wafer boat includes a plurality of attachment pieces, via which the receiving elements are attached to the end plates, wherein each attachment piece has a circumference which is at least 1.5 times as large as the circumference of a receiving section of the receiving elements comprising the receiving slots, and wherein each attachment piece is welded or bonded to at least one of the following: an end plate and a receiving element. In a further embodiment, which may be combined with the above, the receiving elements each have at least one relaxation slot adjacent to the end plates, preferably at least two relaxation slots having a depth, which is smaller than the depth of the receiving slots. When at least two relaxation slots are provided, the depth thereof increases with increased distance to the end plates.

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First Claim