SEMICONDUCTOR ELECTROPLATING SYSTEM
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United States of America Patent
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Issued Date -
Oct 27, 2016
app pub date -
Apr 25, 2016
filing date -
Apr 27, 2015
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Abstract
A semiconductor electroplating system includes a conducting ring and at least one conductive device. The conducting ring is used for carrying a wafer. The conducting ring has at least two connecting points. The wafer has a first surface and an opposite second surface. An isolation layer is located on the second surface. Two ends of the conductive device are respectively connected to the two connecting points of the conducting ring. When the conducting ring is immersed in the plating solution and is energized, a redistribution layer that is to be patterned is formed on the isolation layer. The conductive device is used for transmitting a partial current that passes through one of the connecting points to the other connecting point.
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