PROCESS FOR FORMING GATE INSULATORS FOR TFT STRUCTURES

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United States of America Patent

APP PUB NO 20160315163A1
SERIAL NO

15198980

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Precursors suitable for vapor deposition of layers in thin film transistors and electronic devices comprising such thin film transistors are disclosed.

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Patent Owner(s)

Patent OwnerAddress
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDEPARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
COLAS, ANTOINE OZOIR LA FERRIERE, FR 5 0
DUSSARRAT, CHRISTIAN TOKYO, JP 125 1432
LANSALOT-MATRAS, CLÉMENT PRINCETON, US 40 107

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