THIN-FILM TRANSISTOR, PREPARATION METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 27, 2016
app pub date -
Mar 21, 2016
filing date -
Apr 24, 2015
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
The present invention discloses a thin-film transistor, a preparation method thereof, an array substrate comprising the thin-film transistor, and a display device comprising the array substrate, wherein the preparation method of the thin-film transistor comprises: successively depositing an amorphous silicon thin film and a protective layer thin film on a base substrate; annealing the amorphous silicon thin film so as to transform the amorphous silicon thin film into a poly-silicon thin film; and performing a single patterning process on the poly-silicon thin film and the protective layer thin film to pattern the poly-silicon thin film into an active layer and pattern the protective layer thin film into a protective layer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully