Methods of forming MgO barrier layer

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United States of America Patent

PATENT NO 9890449
SERIAL NO

14699190

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Abstract

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A method of making an MgO barrier layer for a TMR sensor, the method including depositing a first Mg layer in a first chamber, depositing a second Mg layer on the first Mg layer using a reactive oxide deposition process in the presence of oxygen in the first chamber or in a second chamber different than the first chamber, depositing a third Mg layer on the second MgO layer in either the first chamber, the second chamber, or a third chamber, and annealing the first layer, the second layer, and the third layer to form an MgO barrier layer.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
He, Qing Plymouth, US 150 2763
Singleton, Eric W Maple Plain, US 46 569
Yi, Jae Young Prior Lake, US 8 43

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