SUBSTRATE TRANSPORT APPARATUS
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United States of America Patent
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Issued Date -
Nov 10, 2016
app pub date -
Jan 16, 2015
filing date -
Jan 17, 2014
priority date (Note) -
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Abstract
A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
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