Thermal spray material, thermal spray coating and thermal spray coated article

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United States of America Patent

PATENT NO 10106879
APP PUB NO 20160326623A1
SERIAL NO

15142172

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Abstract

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This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE—O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element.

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Patent Owner(s)

  • FUJIMI INCORPORATED; TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ibe, Hiroyuki Kiyosu, JP 63 615
Nagayama, Nobuyuki Miyagi, JP 57 1268
Tsuzuki, Kazuyuki Kiyosu, JP 12 109

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