DEVICE AND METHOD FOR EXAMINING LAYER MATERIAL FOR CONTAMINATION
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United States of America Patent
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Issued Date -
Nov 17, 2016
app pub date -
May 11, 2016
filing date -
May 11, 2015
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Abstract
A device used to examine layer material for contamination. The device comprises a heating device to heat a test area of the layer material and a detector device to detect at least one contaminant desorbed from the layer material. The heating device comprises at least one infra-red heating element. A method comprises heating a test area of the layer material and detecting at least one contaminant desorbed from the layer material. The heating takes place via an infra-red heating element.
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