ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20160336101A1
SERIAL NO

14916725

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601
CKD CORPORATION250 OUJI 2-CHOME KOMAKI-SHI AICHI 485-8551

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ITO, Akihiro Aichi, JP 139 1028
KOUKETSU, Masayuki Aichi, JP 39 289
MORIMOTO, Shigeru Kumagaya-shi, JP 50 498
TANAKA, Koji Kumagaya-shi, JP 376 3502
YOSHIMOTO, Hiromitsu Saitama-shi, JP 21 623

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