Processes for refurbishing a spent sputtering target

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United States of America Patent

PATENT NO 11149343
APP PUB NO 20160348231A1
SERIAL NO

15169455

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Abstract

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Processes for refurbishing a spent sputtering target with a non-circular shape are disclosed. In one form, the processes include the steps of receiving one or more spent sputtering targets, inspecting and weighing the spent sputtering targets, removing any contaminants or other surface impurities from the spent sputtering target surfaces, preparing a hot press die with spacers, disposing the spent sputtering targets in the hot press die, the spacers used to center the spent sputtering targets therein, loading fresh metal refilling powder into the die to account for depleted regions of the spent sputtering targets to produce a powder-filled sputtering target, and applying sufficient heat and force to the filled sputtering target to produce a refurbished sputtering target with homogeneous composition and sufficient adhesion strength.

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Patent Owner(s)

  • MATERION CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komertz, Matthew J New Fairfield, US 5 1
Ma, Longzhou Las Vegas, US 7 28
Testanero, Arthur V New Fairfield, US 5 1
Yang, Xingbo Phoenix, US 13 80

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