ANODE LAYER ION SOURCE AND ION BEAM SPUTTER DEPOSITION MODULE
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United States of America Patent
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Issued Date -
Dec 1, 2016
app pub date -
May 24, 2016
filing date -
May 29, 2015
priority date (Note) -
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Abstract
An anode layer ion source includes a magnetic field generating member, an upper cathode electrode, a lower cathode electrode, a case member, and an anode electrode. The magnetic field generating member generates a magnetic field. The upper cathode electrode and the lower cathode respectively have two end members and form an opening there between. The two end members are two ends of the opening and guide the magnetic field to the opening, and the magnetic field in the openings is substantially parallel to the connection of two ends of the opening. The case member, the upper cathode electrode, and the lower cathode electrode form an accommodating cavity. The anode electrode is disposed in the accommodating cavity and generates an electric field to the opening. The electric field in the opening is substantially perpendicular to the magnetic field in the opening.
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