Matching unit and matching method
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Feb 24, 2015
filing date -
Feb 28, 2014
priority date (Note) -
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Abstract
A matching unit includes a directional coupler for detecting a travelling wave and a reflected wave; a matching circuit including a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit for controlling VC1 and VC2 of the first and the second variable capacitance capacitor by calculating a reflection coefficient based on the travelling wave and the reflected wave. When a distance between the calculated reflection coefficient and a circle described by a trace of the reflection coefficient which passes through a matching point on a Smith chart is greater than a predetermined value, the control unit changes VC2 of the second variable capacitance capacitor and the calculated reflection coefficient to make the distance within the predetermined value. When the distance becomes within the predetermined value, the control unit changes VC1 of the first variable capacitance capacitor and makes the calculated reflection coefficient smaller.
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