RAISED SHOULDER MICRO ELECTRO MECHANICAL SYSTEM (MEMS) MICROPHONE
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United States of America Patent
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Issued Date -
Dec 1, 2016
app pub date -
May 24, 2016
filing date -
May 26, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Microphone devices are disclosed. The microphone device includes a base, a lid, a side wall between the base and the lid, and a MEMS die. The side wall includes a first portion with a first width and a second portion with a second width disposed under the first portion. The first width is less than the second width such that a shoulder is formed on the second portion. The MEMS die is supported on the shoulder. The MEMS die includes a diaphragm and a back plate.
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