Importance

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Abstract

In a displacement sensor, first polarization state light from a light projector is transmitted by a first splitting member and rotated by a first polarization rotation member to third polarization state light. The third polarization state light is transmitted by a second splitting member to a reflecting member, and is rotated by a second polarization rotation member to fourth polarization state light. The fourth polarization state light passes through the second splitting member to a measurement target, then passes through the second splitting member to the reflecting member, and then is rotated by the second polarization rotation member to third polarization state light. The third polarization state light passes through the second splitting member, and is rotated by the first polarization rotation member to second polarization state light. The second polarization state light is transmitted by the first splitting member to a light receiver.

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First Claim