Micro Heater and Micro Sensor
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United States of America Patent
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Issued Date -
Dec 22, 2016
app pub date -
Jun 14, 2016
filing date -
Jun 18, 2015
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Abstract
A micro heater includes a substrate and a heater electrode formed on the substrate. The substrate includes a plurality of pores formed to vertically extend through the substrate. A micro sensor includes a substrate, a sensor electrode formed on the substrate, and a heater electrode formed on the substrate. A protective layer may be used to protect any of the electrodes against oxidation. Any of the electrodes may be formed on a barrier layer positioned on the porous layer.
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